Semiconductor structure with unleveled gate structure and method for forming the same

ABSTRACT

A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a fin structure formed over a substrate and a gate structure formed across the fin structure. In addition, the gate structure includes a gate dielectric layer formed over the substrate and a work function metal layer formed over the gate dielectric layer. The gate structure further includes a gate electrode layer formed over the work function metal layer. In addition, a top surface of the gate electrode layer is located at a position that is higher than that of a top surface of the gate dielectric layer, and the top surface of the gate dielectric layer is located at a position that is higher than that of a top surface of the work function layer.

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cell phones, digital cameras, and otherelectronic equipment. Semiconductor devices are typically fabricated bysequentially depositing insulating or dielectric layers, conductivelayers, and semiconductor layers of material over a semiconductorsubstrate, and patterning the various material layers using lithographyto form circuit components and elements thereon.

One of the important drivers for increased performance in computers isthe higher levels of integration of circuits. This is accomplished byminiaturizing or shrinking device sizes on a given chip. Tolerances playan important role in being able to shrink dimensions on a chip.

However, although existing semiconductor manufacturing processes havegenerally been adequate for their intended purposes, as devicescaling-down continues, they have not been entirely satisfactory in allrespects.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It shouldbe noted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A to 1L are perspective views of various stages of forming asemiconductor structure in accordance with some embodiments.

FIGS. 2A to 2D are cross-sectional representations of various stages offorming the semiconductor structure shown in FIGS. 1I to 1L inaccordance with some embodiments.

FIG. 3A is a perspective view of a semiconductor structure in accordancewith some embodiments.

FIG. 3B is a cross-sectional presentation of the semiconductor structureshown in FIG. 3A in accordance with some embodiments.

FIG. 4 is a perspective view of a semiconductor structure in accordancewith some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Embodiments of semiconductor structures and methods for forming the sameare provided. The semiconductor structure may include a gate structureincluding a gate dielectric layer, a work function metal layer formedover the gate dielectric layer, and a gate electrode layer formed overthe work function metal layer. In addition, the top surfaces of the gatedielectric layer, the work function metal layer, and the gate electrodelayer are not level.

FIGS. 1A to 1L are perspective views of various stages of forming asemiconductor structure 100 in accordance with some embodiments. Asshown in FIG. 1A, a substrate 102 is provided in accordance with someembodiments. Substrate 102 may be a semiconductor wafer such as asilicon wafer. Alternatively or additionally, substrate 102 may includeelementary semiconductor materials, compound semiconductor materials,and/or alloy semiconductor materials. Examples of the elementarysemiconductor materials may be, but are not limited to, crystal silicon,polycrystalline silicon, amorphous silicon, germanium, and/or diamond.Examples of the compound semiconductor materials may be, but are notlimited to, silicon carbide, gallium arsenic, gallium phosphide, indiumphosphide, indium arsenide, and/or indium antimonide. Examples of thealloy semiconductor materials may be, but are not limited to, SiGe,GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP.

In addition, substrate 102 may include structures such as doped regions,interlayer dielectric (ILD) layers, conductive features, and/orisolation structures. Furthermore, substrate 102 may further includesingle or multiple material layers to be patterned. For example, thematerial layers may include a silicon layer, a dielectric layer, and/ora doped poly-silicon layer.

A dielectric layer 104 and a mask layer 106 are formed over substrate102, and a photo-sensitive layer 108 is formed over mask layer 104, asshown in FIG. 1A in accordance with some embodiments. Dielectric layer104 may be used as an adhesion layer between substrate 102 and masklayer 106. In addition, dielectric layer 104 may also be used as an etchstop layer for etching mask layer 106. In some embodiments, dielectriclayer 104 is made of silicon oxide. Dielectric layer 104 may be formedby using a thermal oxidation process, although other depositionprocesses may be used in some other embodiments.

Mask layer 106 may be used as a hard mask during subsequentphotolithography processes. In some embodiments, mask layer 106 is madeof silicon nitride. Mask layer 106 may be formed by using low-pressurechemical vapor deposition (LPCVD) or plasma enhanced chemical vapordeposition (PECVD), although other deposition processes may also be usedin some other embodiments.

Next, a fin structure 110 is formed by sequentially etching mask layer106, dielectric layer 104, and substrate 102 through photo-sensitivelayer 108, as shown in FIG. 1B in accordance with some embodiments.Afterwards, photo-sensitive layer 108 is removed.

After fin structure 110 is formed, an insulating layer 112 is formed tocover fin structures 110 over substrate 102, as shown in FIG. 1C inaccordance with some embodiments. In some embodiments, insulating layer112 is made of silicon oxide, silicon nitride, silicon oxynitride,fluoride-doped silicate glass (FSG), or other low-K dielectricmaterials. Insulating layer 112 may be formed by using ahigh-density-plasma (HDP) CVD process, although other depositionprocesses may be used in other embodiments.

Next, insulating layer 112 is recessed to form an isolation structure114, such as a shallow trench isolation structure, around fin structure110, as shown in FIG. 1D in accordance with some embodiments. Insulatinglayer 112 may be recessed by a wet etching process or a dry etchingprocess. In addition, mask layer 106 and dielectric layer 104 areremoved.

Afterwards, a dummy gate structure 116 is formed across fin structure110 and extends over isolation structure 114. In some embodiments, dummygate structure 116 includes a dummy gate dielectric layer 118 and adummy gate electrode layer 120 formed over dummy gate dielectric layer118. In some embodiments, dummy gate dielectric layer 118 is made ofhigh-k dielectric materials, such as metal oxides, metal nitrides, metalsilicates, transition metal-oxides, transition metal-nitrides,transition metal-silicates, or oxynitrides of metals. Examples of thehigh-k dielectric material include, but are not limited to, hafniumoxide (HfO₂), hafnium silicon oxide (HfSiO), hafnium silicon oxynitride(HfSiON), hafnium tantalum oxide (HfTaO), hafnium titanium oxide(HfTiO), hafnium zirconium oxide (HfZrO), zirconium oxide, titaniumoxide, aluminum oxide, hafnium dioxide-alumina (HfO₂-Al₂O₃) alloy, orother applicable dielectric materials. In some embodiments, dummy gateelectrode layer 120 is made of polysilicon.

After dummy gate structure 116 is formed, spacers 122 are formed on thesidewalls of dummy gate structure 116 in accordance with someembodiments. In some embodiments, spacers 122 are made of siliconnitride, silicon oxide, silicon oxynitride, silicon carbide, or otherapplicable dielectric materials. Spacers 122 may include a single layeror multiple layers.

Next, source/drain structures 124 are formed in fin structure 110, asshown in FIG. 1E in accordance with some embodiments. In someembodiments, portions of fin structure 110 adjacent to dummy gatestructure 116 are recessed to form recesses at two sides of finstructure 110, and a strained material is grown in the recesses by anepitaxial (epi) process to form source/drain structures 124. Inaddition, the lattice constant of the strained material may be differentfrom the lattice constant of substrate 102. In some embodiments,source/drain structures 124 include Ge, SiGe, InAs, InGaAs, InSb, GaAs,GaSb, InAlP, InP, or the like.

After source/drain structures 124 are formed, a contact etch stop layer(CESL) 126 is formed over substrate 102, and an inter-layer dielectric(ILD) layer 128 is formed over contact etch stop layer 126, as shown inFIG. 1F in accordance with some embodiments. In some embodiments,contact etch stop layer 126 is made of silicon nitride, siliconoxynitride, and/or other applicable materials. Contact etch stop layer126 may be formed by plasma enhanced CVD, low pressure CVD, ALD, orother applicable processes.

Inter-layer dielectric layer 128 may include multilayers made ofmultiple dielectric materials, such as silicon oxide, silicon nitride,silicon oxynitride, phosphosilicate glass (PSG), borophosphosilicateglass (BPSG), and/or other applicable low-k dielectric materials.Inter-layer dielectric layer 128 may be formed by chemical vapordeposition (CVD), physical vapor deposition, (PVD), atomic layerdeposition (ALD), spin-on coating, or other applicable processes.

Next, a polishing process is performed on inter-layer dielectric layer128 and contact etch stop layer 126 to expose the top surface of dummygate structure 116 in accordance with some embodiments. In someembodiments, a chemical mechanical polishing (CMP) process is performeduntil the top surface of dummy gate structure 116 is exposed.

After the polishing process is performed, dummy gate structure 116 isremoved, such that a trench 130 is formed, as shown in FIG. 1G inaccordance with some embodiments. In some embodiments, dummy gatestructure 116 is removed by performing a dry etching process. In someembodiments, dummy gate structure 116 is removed by performing a dryetching process and a wet etching process.

After dummy gate structure 116 is removed, a metal gate structure 132 isformed in trench 130, as shown in FIG. 1H in accordance with someembodiments. In some embodiments, metal gate structure 132 includes agate dielectric layer 134, a work function metal layer 136, and a gateelectrode layer 138. More specifically, gate dielectric layer 134 isformed on the sidewalls and bottom surface of trench 130, and workfunction metal layer 136 and gate electrode layer 138 are formed overgate dielectric layer 134 afterwards. As shown in FIG. 1F, at this stageof the manufacturing process, the top surfaces of gate dielectric layer134, work function metal layer 136, and gate electrode layer 138 arelevel.

In some embodiments, the thickness of work function metal layer 136 isgreater than the thickness of gate dielectric layer 134, as shown inFIG. 1H. The thickness of work function metal layer 136 and thethickness of gate dielectric layer 134 may be measured in a directionparallel to the top surface of substrate 102. In some embodiments, gatedielectric layer 134 has a thickness in a range from about 5 Å to about15 Å. In some embodiments, work function metal layer 136 has a thicknessin a range from about 50 Å to about 500 Å. In some embodiments, gateelectrode layer 138 has a thickness in a range from about 5 Å to about500 Å.

In some embodiments, gate dielectric layer 134 is made of high-kdielectric materials, such as metal oxides, metal nitrides, metalsilicates, transition metal-oxides, transition metal-nitrides,transition metal-silicates, or oxynitrides of metals. Examples of thehigh-k dielectric material include, but are not limited to, hafniumoxide (HfO₂), hafnium silicon oxide (HfSiO), hafnium silicon oxynitride(HfSiON), hafnium tantalum oxide (HfTaO), hafnium titanium oxide(HfTiO), hafnium zirconium oxide (HfZrO), zirconium oxide, titaniumoxide, aluminum oxide, hafnium dioxide-alumina (HfO₂-Al₂O₃) alloy, orother applicable dielectric materials.

Work function metal layer 136 is formed over gate dielectric layer 134in accordance with some embodiments. Work function metal layer 136 iscustomized to have the proper work function. For example, if a P-typework function metal (P-metal) for a PMOS device is desired, TiN, WN, orW may be used. On the other hand, if an N-type work function metal(N-metal) for NMOS devices is desired, TiAl, TiAlN, or TaCN, may beused.

Gate electrode layer 138 is formed over work function metal layer 136 inaccordance with some embodiments. In some embodiments, gate electrodelayer 138 is made of a conductive material, such as aluminum, copper,tungsten, titanium, tantulum, or other applicable materials. Gatedielectric layer 134, work function metal layer 136, and gate electrodelayer 138 may be formed by any applicable process to any applicablethickness.

It should be noted that additional layers may be formed above and/orbelow gate dielectric layer 134, work function metal layer 136, and gateelectrode layer 138, such as liner layers, interface layers, seedlayers, adhesion layers, barrier layers, or the like. In addition, gatedielectric layer 134, work function metal layer 136, and gate electrodelayer 138 may include more than one layer made of various materials.

Next, etching processes are performed to etch work function metal layer136, gate dielectric layer 134, and gate electrode layer 138 and to forma hard mask structure over the etched gate structure 132′ in accordancewith some embodiments. FIGS. 2A to 2D are cross-sectionalrepresentations of various stages of forming semiconductor structure 100shown in FIGS. 1I to 1L in accordance with some embodiments.

More specifically, the top portions of work function metal layer 136 areremoved to form etched work function metal layer 136′, as shown in FIGS.1I and 2A in accordance with some embodiments. In some embodiments, thetop portions of work function metal layer 136 are removed by performinga first etching process 140. During first etching process 140, the topportions of work function metal layer 136 are removed to form firstrecesses 142 between gate dielectric layer 134 and gate electrode layer138.

As shown in FIG. 2A, first recess 142 has a first thickness T₁, which isequal to the thickness of the top portion of work function metal layer136 removed during first etching process 140. In some embodiments, thefirst thickness T₁ is in a range from about 10 nm to about 50 nm. If thefirst thickness T₁ is too large, the breakdown voltage of the resultingsemiconductor structure may be affected due to too much of work functionmetal layer 136 being removed. On the other hand, if the first thicknessT₁ is too small, the risk of a short circuit in the resultingsemiconductor structure may be increased. Since work function metallayer 136 has a relatively large thickness, the removal of the topportion of work function metal layer 136 may be easier. Therefore, thedistance D₁ between the top surface of etched work function metal layer136′ and the top surface of isolation structure 114 can be bettercontrolled.

After the top portions of work function metal layer 136 are removed, thetop portions of gate dielectric layer 134 are removed to form etchedgate dielectric layer 134′, as shown in FIGS. 1J and 2B in accordancewith some embodiments. In some embodiments, the top portions of gatedielectric layer 134 are removed by performing a second etching process144. In some embodiments, second etching process 144 is performed afterfirst etching process 140 is performed. During second etching process144, the top portions of gate dielectric layer 134 are removed to formsecond recesses 146.

As shown in FIG. 2B, second recess 146 has a second thickness T₂, whichis equal to the thickness of the top portion of gate dielectric layer134 removed during second etching process 144. In some embodiments,second thickness T₂ of second recess 146 is smaller than first thicknessT₁ of first recess 142. It should be noted that second recess 146 is inthe region where the top portion of gate dielectric layer 134 used to belocated before second etching process 144 was performed. That is, thedot line shown in FIG. 2B is drawn to provide a better understanding ofthe structure, and there is no actual interface or boundary betweenfirst recess 142 and second recess 146.

In some embodiments, the second thickness T₂ is in a range from about 5nm to about 50 nm. If the second thickness T₂ is too large, thebreakdown voltage of the resulting semiconductor structure may beaffected due to too much of gate dielectric layer 134 being removed. Onthe other hand, if the second thickness T₂ is too small, the risk of ashort circuit in the resulting semiconductor structure may be increased.

As described previously, the top portion of work function metal layer136 is first removed to form first recess 142 before the top portion ofgate dielectric layer 134 is removed. As shown in FIG. 2B, a portion ofgate dielectric layer 134 is exposed by first recess 142. In addition,since work function metal layer 136 has a relatively greater thickness(e.g. greater than the thickness of gate dielectric layer 134), theresulting first recess 142 also has a relatively great thickness.Accordingly, the removal of the top portion of gate dielectric layer 134can become easier to control, and the distance D₂ between the topsurface of etched gate dielectric layer 134′ and the top surface ofisolation structure 114 can be better controlled. In some embodiments,the distance D₂ is greater than the distance D₁.

After the top portions of gate dielectric layer 134 are removed, the topportion of gate electrode layer 138 is removed to form an etched gateelectrode layer 138′, as shown in FIGS. 1K and 2C in accordance withsome embodiments. In some embodiments, the top portion of gate electrodelayer 138 is removed by performing a third etching process 148. In someembodiments, third etching process 148 is performed after second etchingprocess 144 is performed. During third etching process 148, the topportion of gate electrode layer 138 is removed to form a third recess150.

As shown in FIG. 2C, third recess 150 has a third thickness T₃, which isequal to the thickness of the top portion of gate electrode layer 138removed during third etching process 148. In some embodiments, thirdthickness T₃ of third recess 150 is smaller than first thickness T₁ offirst recess 142 and second thickness of second recess 146. It should benoted that third recess 150 is in the region where the top portion ofgate electrode layer 138 used to be located before third etching process148 was performed. That is, the dot line shown in FIG. 2C is drawn toprovide a better understanding of the structure, but there is no actualinterface or boundary between third recess 150 and first recess 142.

In some embodiments, the third thickness T₃ is in a range from about 0.1nm to about 50 nm. If the third thickness T₃ is too large, theresistance of the resulting semiconductor structure may be too high. Onthe other hand, if the third thickness T₃ is too small, the risk of ashort circuit in the resulting semiconductor structure may be increased.In addition, the distance D₃ between the top portion of etched gateelectrode layer 138′ and the top surface of isolation structure 114 maybe better controlled. In some embodiments, the distance D₃ is greaterthan the distance D₂ and also greater than the distance D₁. In someembodiments, the ratio of distance D₃ to distance D₁ is in a range fromabout 1.1 to about 2.5. In some embodiments, the ratio of distance D₃ todistance D₂ is in a range from about 1.1 to about 2.5.

As shown in FIG. 2C, by removing the top portions of work function metallayer 136, gate dielectric layer 134, and gate electrode layer 138having different thicknesses, the top surfaces of etched work functionmetal layer 136′, etched gate dielectric layer 134′, and etched gateelectrode layer 138′ are not level, and the bottom surface of theresulting recess, which is formed between spacers 122, is not flat,either. After the recess consisting of first recesses 142, secondrecesses 146, and third recess 150 is formed, a hard mask structure 152is formed in the recess over the etched gate structure 132′, as shown inFIGS. 1L and 2D in accordance with some embodiments. In someembodiments, hard mask structure 152 includes first portions 154, secondportions 156, and a third portion 158, and the thicknesses of firstportions 154, second portions 156, and third portion 158 of the hardmask structure 152 are different.

More specifically, first portions 154 of hard mask structure 152 areformed in first recesses 142 over etched work function metal layer 136′.That is, first portions 154 of hard mask structure 152 are in directcontact with the top surface of etched work function metal layer 136′.In addition, since first portions 154 of hard mask structure 152 areformed in first recesses 142, they have the same thickness. That is,first portion 154 of hard mask structure 152 also has a first thicknessT₁. The first thickness T₁ may be measured in a direction vertical tothe top surface of substrate 102. As described previously, if the firstthickness T₁ is too large, the breakdown voltage of the resultingsemiconductor structure may be affected due to too much of work functionmetal layer 136 being removed. On the other hand, if the first thicknessT₁ is too small, the risk of a short circuit in the resultingsemiconductor structure may be increased. As shown in FIG. 2D, the firstthickness T₁ can also be seen as the distance between the top surface ofhard mask structure 152 and the top surface of etched work functionmetal layer 136′.

Similarly, second portions 156 of hard mask structure 152 are formed insecond recesses 146 over etched gate dielectric layer 134′. That is,second portions 156 of hard mask structure 152 are in direct contactwith the top surface of etched gate dielectric layer 134′. In addition,since second portions 156 of hard mask structure 152 are formed insecond recesses 146, they have the same thickness. That is, secondportion 156 of hard mask structure 152 also has a second thickness T₂.The second thickness T₂ may be measured in a direction vertical to thetop surface of substrate 102. As described previously, if the secondthickness T₂ is too large, the breakdown voltage of the resultingsemiconductor structure may be affected due to too much of gatedielectric layer 134 being removed. On the other hand, if the secondthickness T₂ is too small, the risk of a short circuit in the resultingsemiconductor structure may be increased. As shown in FIG. 2D, thesecond thickness T₂ can also be seen as the distance between the topsurface of hard mask structure 152 and the top surface of etched gatedielectric layer 134′. In addition, the first thickness T₁ of firstportion 154 is thicker than the second thickness T₂ of second portion156.

Third portion 158 of hard mask structure 152 is formed in third recesses150 over etched gate electrode layer 138′. That is, third portion 158 ofhard mask structure 152 is in direct contact with the top surface ofetched gate electrode layer 138′. In addition, since third portion 158of hard mask structure 150 is formed in third recess 152, they have thesame thickness. That is, third portion 158 of hard mask structure 152also has a third thickness T₃. The third thickness T₃ may be measured ina direction vertical to the top surface of substrate 102. As describedpreviously, if the third thickness T₃ is too large, the resistance ofthe resulting semiconductor structure may be too high. On the otherhand, if the third thickness T₃ is too small, the risk of a shortcircuit in the resulting semiconductor structure may be increased. Asshown in FIG. 2D, the third thickness T₃ can also be seen as thedistance between the top surface of hard mask structure 152 and the topsurface of etched gate electrode layer 138′. In addition, the secondthickness T₂ of second portion 156 is thicker than the third thicknessT₃ of third portion 158.

In some embodiments, the difference between third thickness T₃ and firstthickness T₁ is in a range from about 0.1 nm to about 10 nm. As shown inFIG. 2D, the difference between third thickness T₃ and first thicknessT₁ can be seen as the distance between the top surface of etched gateelectrode layer 138′ and the top surface of etched work function metallayer 136′. In some embodiments, the difference between third thicknessT₃ and second thickness T₂ is in a range from about 0.1 nm to about 10nm. In some embodiments, the difference between second thickness T₂ andfirst thickness T₁ is in a range from about 0.1 nm to about 5 nm. Asshown in FIG. 2D, the difference between second thickness T₂ and firstthickness T₁ can be seen as the distance between the top surface ofetched work function metal layer 136′ and the top surface of etched gatedielectric layer 134′.

In some embodiments, hard mask structure 152 is formed by filling firstrecesses 142, second recesses 146, and third recess 150 with adielectric material. In some embodiments, hard mask structure 152 ismade of silicon nitride. Hard mask structure 152 may be formed by usinglow-pressure chemical vapor deposition (LPCVD) or plasma enhancedchemical vapor deposition (PECVD), although other deposition processesmay also be used in some other embodiments.

As shown in FIG. 2D, semiconductor structure 100 includes etched gatestructure 132′ and hard mask structure 152 formed over etched gatestructure 132′. In addition, hard mask structure 152 has an unleveledbottom surface. In some embodiments, an upper portion of etched gateelectrode layer 138′ is embedded in hard mask structure 152, while abottom portion of etched gate electrode layer 138′ is embedded in etchedwork function metal layer 136′. As shown in FIG. 2D, etched gatestructure 132′ has an unleveled top surface.

More specifically, in some embodiments, the top surface of etched gateelectrode layer 138′, which can also be seen as the bottom surface ofthird portion 158 of hard mask structure 152, is located at a positionthat is higher than the top surface of etched gate dielectric layer134′, which can also be seen as the bottom surface of second portion 156of hard mask structure 152. In some embodiments, the top surface ofetched gate dielectric layer 134′, which can also be seen as the bottomsurface of second portion 156 of hard mask structure 152, is located ata position that is higher than the top surface of etched work functionmetal layer 136′, which can also be seen as the bottom surface of firstportion 154 of hard mask structure 152.

As described previously, first recess 142 is first formed between gatedielectric layer 134 and gate electrode layer 138 and has a relativelygreat thickness. Therefore, the removal of the top portion of gatedielectric layer 134, which has been at least partially exposed by firstrecess 142, can become easier. Accordingly, the top surface of etchedgate dielectric layer 134′ can be at a position that is lower than thetop surface of etched gate electrode layer 138′, and the risk of a shortcircuit between the etched gate dielectric layer 134′ and a conductivestructure formed nearby can be reduced.

FIG. 3A is a perspective view of a semiconductor structure 100 a inaccordance with some embodiments. FIG. 3B is a cross-sectionalrepresentation of semiconductor structure 100 a shown in FIG. 3A inaccordance with some embodiments. Semiconductor structure 100 a issimilar to, or the same as, semiconductor structure 100 shown in FIGS.1L and 2D, except the top surfaces of an etched gate dielectric layer134 a′ and an etched work function metal layer 136 a′ are level.Processes and materials used to form semiconductor structure 100 a maybe similar to, or the same as, those used to form semiconductorstructure 100 and are not repeated herein.

More specifically, semiconductor structure 100 a includes an etched gatestructure 132 a′ formed across fin structure 100 over substrate 102 andhard mask structure 152 a formed over etched gate structure 132 a′, asshown in FIG. 3A in accordance with some embodiments. Etched gatestructure 132 a′ includes etched gate dielectric layer 134 a′, etchedwork function metal layer 136 a′ formed over etched gate dielectriclayer 134 a′, and etched gate electrode layer 138 a′ formed over etchedwork function metal layer 136 a′. In addition, the top surface of etchedgate electrode layer 138 a′ is located at a position that is higher thanthat of the top surface of etched work function metal layer 136 a′, andthe top surfaces of etched work function metal layer 136 a′ and etchedgate dielectric layer 134 a′ are level in accordance with someembodiments.

Accordingly, the thicknesses of first portions 154 a and second portions156 a of hard mask structure 152 a are substantially equal, while thethickness of a third portion 158 a of hard mask structure 152 a isthicker than those of first portions 154 a and second portions 156 a.

However, although etched gate dielectric layer 134 a′ and etched workfunction metal layer 136 a′ are substantially level, the processes usedto form etched gate structure 132 a′ may also be the same as, or similarto, those shown in FIGS. 1I to 1K. That is, the top portion of a workfunction metal layer is etched and removed to form a first recess overetched work function metal layer 136 a′, and the top portion of a gatedielectric layer is etched and removed afterwards. Since the gatedielectric layer is etched after the first recess is formed, it will beeasier to completely remove the top portion of the gate dielectric layerwithout leaving some residue over spacers 122. Accordingly, the heightof gate dielectric layer 134 a can be better controlled and the risk ofa short circuit can be reduced.

FIG. 4 is a perspective view of a semiconductor structure 100 b inaccordance with some embodiments. Some processes and materials used toform semiconductor structure 100 b are similar to, or the same as, thoseused to form semiconductor structure 100 and are not repeated herein.

More specifically, semiconductor structure 100 b includes a first etchedgate structure 132 b′ and a second etched gate structure 132 c′ formedacross fin structure 100 over substrate 102 and a first hard maskstructure 152 b and a second hard mask structure 152 c respectivelyformed over first etched gate structure 132 b′ and second etched gatestructure 132 c′, as shown in FIG. 4 in accordance with someembodiments.

First etched gate structure 132 b′ includes an etched gate dielectriclayer 134 b′, an etched work function metal layer 136 b′ formed overetched gate dielectric layer 134 b′, and an etched gate electrode layer138 b′ formed over etched work function metal layer 136 b′. In addition,the top surface of etched gate electrode layer 138 b′ is located at aposition that is higher than that of the top surface of etched gatedielectric layer 134 b′, and the top surface of etched gate dielectriclayer 134 b′ is located at a position that is higher than that of thetop surface of etched work function metal layer 136 b′ in accordancewith some embodiments.

Second etched gate structure 132 c′ includes an etched gate dielectriclayer 134 c′, etched work function metal layers 136-1 c′ and 136-2 c′formed over etched gate dielectric layer 134 c′, and etched gateelectrode layer 138 c′ formed over etched work function metal layer136-2 c′. In addition, the top surface of etched gate electrode layer138 c′ is located at a position that is higher than that of the topsurface of etched gate dielectric layer 134 c′, and the top surface ofetched gate dielectric layer 134 c′ is located at a position that ishigher than that of the top surfaces of etched work function metallayers 136-1 c′ and 136-2 c′ in accordance with some embodiments.

In some embodiments, work function metal layer 136 b and work functionmetal layers 136-1 c and 136-2 c are made of different materials. Insome embodiments, first etched gate structure 132 b′ is an n-type gatestructure, and second etched gate structure 132 c′ is a p-type gatestructure. In some embodiments, first etching process 140, as shown inFIG. 2A and described previously, is performed to form first recessesover etched work function metal layers 136 b′, 136-1 c′, and 136-2 c′.Afterwards, second etching process 144, as shown in FIG. 2B anddescribed previously, is performed to form second recesses over etchedgate dielectric layers 134 b′ and 134 c′. As described previously, sincethe gate dielectric layers are etched after the first recesses areformed, it will be easier to completely remove the top portions of thegate dielectric layers without leaving some residue over spacers 122.Accordingly, the height of etched gate dielectric layers 134 b′ and 134c′ can be better controlled and the risk of a short circuit can bereduced.

Generally, the top portion of a gate structure is removed to form a hardmask structure over the etched gate structure (e.g. etched gatestructure 132′, 132 a′ and 132 b′). When the gate structure includes agate dielectric layer, a work function metal layer, and a gate electrodelayer, and top portions of them may be removed by performing differentetching processes.

However, since gate dielectric layer (e.g. gate dielectric layer 134) isrelatively thin, the removal of the top portion of the gate dielectriclayer may be challenging. For example, some residues may remain on thesidewalls of the spacers (e.g. spacers 122), resulting in increasing therisk of a short circuit between the gate dielectric layer and theconductive structure formed nearby. Accordingly, in some embodiments,before the top portion of gate dielectric layer 134 is removed, firstetching process 140 is first performed to remove the top portion of workfunction metal layer 136 and to form first recess 142 over etched workfunction metal layer 136′. The top portion of gate dielectric layer 134is removed afterwards. That is, the top portion of gate dielectric layer134 is removed after first recess 142 is formed.

Since the thickness of work function metal layer 136 is greater thanthat of gate dielectric layer 134, the removal of the top portion ofwork function metal layer is relatively easier. In addition, theresulting first recess 142 may has a relatively great thickness.Accordingly, when the top portion of gate dielectric layer 134 isremoved, a portion of gate dielectric layer 134 has been exposed byfirst recess 142, and therefore the removal of the top portion of gatedielectric layer 134, which has a relatively small thickness, can becomeeasier. As a result, the risk of a short circuit can be reduced, and thereliability of the manufacturing processes can be improved.

Embodiments of a semiconductor structure and methods for forming thesemiconductor structures are provided. The semiconductor structureincludes a gate structure and a hard mask structure formed over the gatestructure. The gate structure further includes a gate dielectric layer,a work function metal layer, and a gate electrode layer. The top surfaceof the gate electrode layer is located at a position that is higher thanthe top surface of the gate dielectric layer, so that the risk of ashort circuit can be prevented.

In some embodiments, a semiconductor structure is provided. Thesemiconductor structure includes a fin structure formed over a substrateand a gate structure formed across the fin structure. In addition, thegate structure includes a gate dielectric layer formed over thesubstrate and a work function metal layer formed over the gatedielectric layer. The gate structure further includes a gate electrodelayer formed over the work function metal layer. In addition, a topsurface of the gate electrode layer is located at a position that ishigher than that of a top surface of the gate dielectric layer, and thetop surface of the gate dielectric layer is located at a position thatis higher than that of a top surface of the work function layer.

In some embodiments, a semiconductor structure is provided. Thesemiconductor structure includes a fin structure formed over a substrateand a gate structure formed across the fin structure. In addition, thegate structure includes a gate dielectric layer formed over thesubstrate and a work function metal layer formed over the gatedielectric layer. The gate structure further includes a gate electrodelayer formed over the work function metal layer. The semiconductorstructure further includes a hard mask structure formed over the gatestructure. In addition, the hard mask structure comprises a firstportion formed over the work function metal layer, a second portionformed over the gate dielectric layer, and a third portion formed overthe gate electrode layer, and the thicknesses of the first portion, thesecond portion, and the third portion of the hard mask structure aredifferent.

In some embodiments, a method for manufacturing a semiconductorstructure is provided. The method for manufacturing a semiconductorstructure includes forming a fin structure over a substrate and forminga dummy gate structure across the fin structure. The method formanufacturing a semiconductor structure further includes forming spacerson sidewalls of the dummy gate structure and removing the dummy gatestructure to form a trench between the spacers. The method formanufacturing a semiconductor structure further includes forming a gatedielectric layer on sidewalls and a bottom surface of the trench andforming a work function metal layer over the gate dielectric layer. Themethod for manufacturing a semiconductor structure further includesforming a gate electrode layer over the work function metal layer andremoving a top portion of the work function metal layer to form anetched work function metal layer. The method for manufacturing asemiconductor structure further includes removing a top portion of thegate dielectric layer to form an etched gate dielectric layer after thetop portion of the work function metal layer is removed and removing atop portion of the gate electrode layer to form an etched gate electrodelayer after the top portion of the gate dielectric layer is removed.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1-12. (canceled)
 13. A method for manufacturing a semiconductorstructure, comprising: forming a fin structure over a substrate; forminga dummy gate structure across the fin structure; forming spacers onsidewalls of the dummy gate structure; removing the dummy gate structureto form a trench between the spacers; forming a gate dielectric layer onsidewalls and a bottom surface of the trench; forming a work functionmetal layer over the gate dielectric layer; forming a gate electrodelayer over the work function metal layer; removing a top portion of thework function metal layer to form an etched work function metal layer;removing a top portion of the gate dielectric layer to form an etchedgate dielectric layer after the top portion of the work function metallayer is removed; and removing a top portion of the gate electrode layerto form an etched gate electrode layer after the top portion of the gatedielectric layer is removed.
 14. The semiconductor structure as claimedin claim 13, wherein the thickness of the work function metal layer isgreater than the thickness of the gate dielectric layer.
 15. The methodfor manufacturing a semiconductor structure as claimed in claim 13,wherein the top portion of the work function layer is removed byperforming a first etching process, and a first recess is formed betweenthe gate electrode layer and the gate dielectric layer after the firstetching process.
 16. The method for manufacturing a semiconductorstructure as claimed in claim 15, wherein the top portion of the gatedielectric layer is removed to form a second recess by performing asecond etching process, and the top portion of the gate electrode layeris removed to form a third recess by performing a third etching process.17. The method for manufacturing a semiconductor structure as claimed inclaim 16, further comprising filling the first recess, the secondrecess, and the third recess with a dielectric material to form a hardmask structure over the etched gate electrode layer, the etched workfunction metal layer, and the etched gate dielectric layer.
 18. Themethod for manufacturing a semiconductor structure as claimed in claim16, wherein the top portion of the work function metal layer removed bythe first etching process has a first thickness, the top portion of thegate dielectric layer removed by the second etching process has a secondthickness, and the top portion of the gate electrode layer removed bythe third etching process has a third thickness, and the firstthickness, the second thickness, and the third thickness are different.19. The method for manufacturing a semiconductor structure as claimed inclaim 12, further comprising: forming a hard mask structure comprising afirst portion, a second portion, and a third portion, wherein the firstportion of the hard mask structure is formed over the etched workfunction metal layer, the second portion of the hard mask structure isformed over the etched gate dielectric layer, and the third portion ofthe hard mask structure is formed over the etched gate electrode layer,and the thicknesses of the first portion, the second portion, and thethird portion of the hard mask structure are different.
 20. The methodfor manufacturing a semiconductor structure as claimed in claim 12,wherein a top surface of the etched gate electrode layer is located at aposition that is higher than a top surface of the etched gate dielectriclayer, and a top surface of the gate dielectric layer is located at aposition that is higher than a top surface of the etched work functionmetal layer.
 21. A method for manufacturing a semiconductor structure,comprising: forming a metal gate structure over a substrate, the metalgate structure comprising: a gate dielectric layer; a work functionmetal layer formed over the gate dielectric layer; and a gate electrodelayer formed over the work function metal layer, removing a top portionof the work function metal layer; and removing a top portion of the gatedielectric layer after the top portion of the work function metal layeris removed.
 22. The method for manufacturing a semiconductor structureas claimed in claim 21, wherein a first recess is formed after the topportion of the work function metal layer is removed, and a sidewall ofthe gate dielectric layer is exposed by the first recess.
 23. The methodfor manufacturing a semiconductor structure as claimed in claim 21,further comprising: removing a top portion of the gate electrode layerafter the top portion of the gate dielectric layer is removed; andforming a hard mask structure covering the gate electrode layer, thework function metal layer, and the gate dielectric layer, wherein thebottom surface of the hard mask structure is not flat.
 24. The methodfor manufacturing a semiconductor structure as claimed in claim 21,wherein a portion of the gate electrode layer extends into the hard maskstructure.
 25. The method for manufacturing a semiconductor structure asclaimed in claim 24, wherein a top surface of the gate electrode layeris located at a position that is higher than that of a top surface ofthe gate dielectric layer, and the top surface of the gate dielectriclayer is located at a position that is higher than that of a top surfaceof the work function metal layer.
 26. The method for manufacturing asemiconductor structure as claimed in claim 21, wherein a thickness ofthe removed top portion of the work function metal layer is greater thana thickness of the removed top portion of the gate dielectric layer. 27.A method for manufacturing a semiconductor structure, comprising:forming a metal gate structure over a substrate, the metal gatestructure comprising: a gate dielectric layer; a work function metallayer formed over the gate dielectric layer; and a gate electrode layerformed over the work function metal layer, removing a top portion of thework function metal layer to form a first recess; removing a top portionof the gate dielectric layer to form a second trench after the firsttrench is formed; and removing a top portion of the gate electrode layerto form a third trench after the second trench is formed.
 28. The methodfor manufacturing a semiconductor structure as claimed in claim 27,wherein the first recess is formed between the gate dielectric layer andthe gate electrode layer.
 29. The method for manufacturing asemiconductor structure as claimed in claim 27, wherein a thickness ofthe first trench is greater than a thickness of the second trench, andthe thickness of the second trench is greater than a thickness of thethird trench.
 30. The method for manufacturing a semiconductor structureas claimed in claim 27 further comprising: filling the first trench, thesecond trench, and the third trench to form a hard mask structure. 31.The method for manufacturing a semiconductor structure as claimed inclaim 30 wherein the hard mask structure comprises a first portionformed in the first trench over the work function metal layer, a secondportion formed in the second trench over the gate dielectric layer, anda third portion formed in the third trench over the gate electrodelayer, and the thickness of the first portion, the second portion, andthe third portion of the hard mask structure are different.
 32. Themethod for manufacturing a semiconductor structure as claimed in claim30, wherein a portion of the gate electrode layer extends into the hardmask structure.